IHTM PLAVI
University of Belgrade
Institute of Chemistry, Technology and Metallurgy
National Institute of the Republic of Serbia

grb BUUniversity of Belgrade

Milče M. Smiljanić

Associate Research Professor
Deputy MEMS Lab Manager

 

 

 

 

Address:

Center of Microelectronic Technologies, Institute of Chemistry, Technology and Metallurgy,
University of Belgrade, Njegoševa 12, 11000 Belgrade, Serbia

Telephone: +381 11 2630 757
Fax: +381 11 182 995
E-mail: smilce@nanosys.ihtm.bg.ac.rs

Short biography:

Milče M. Smiljanić was born in Belgrade, Serbia. She received her Dipl.ing, Mag. sci. and Ph.D. degrees in electrical engineering from the School of Electrical Engineering, University of Belgrade, Department for Optoelectronics and laser technique. Currently, she is an associate research professor at the Institute of Chemistry, Technology and Metallurgy, Department of Microelectronic Technologies. She works as a process engineer for photolithography, wet chemical etching of silicon (TMAH, KOH), wet chemical etching of Pyrex glass and anodic bonding. Her research interests are: micromachining of silicon and Pyrex glass for various sensors and actuators, piezoresistive pressure sensors, microcantilevers with piezoresistive readout, Au-based microcantilevers for magnetic field measurement, silicon photodiodes, microfluidic platforms, graphene sensors.

Professional Achievements:

  • Design and fabrication of IHTM commercial pressure sensors SP-6 and SP-12 installed in facilities of several companies: EPS (incumbent electric power provider in Serbia), water supply companies and Srbijagas (incumbent gas provider in Serbia).
  • Fabrication of the Au-based microcantilever for magnetic field measurement prototype.
  • Design and fabrication of the high temperature pressure sensor SP-11 prototype.
  • Design and fabrication of the functional models of Phase Change Actuators.
  • Design and fabrication of the functional models of various microfluidic platfroms (CellFOS, microreactor for TiO2 syntehsis and complex microfluidic microchannels network).

Major Projects:

International:
2005 – 2008 Micro-nano cantilever based detection of small electromagnetic forces, SCOPES IB 7320-110923, Swiss National Science Foundation
2008 – 2011 Reinforcement of Regional Microsystems and Nanosystems Centre REGMINA, Proj. No. 205533, 7th Framework Programme, European Union
2013 – 2015 Phase Change Actuator, Scientific Partner ACMIT, Austria
2015 – now CellFOS-Optofluidic Platform, Scientific Partner ACMIT, Austria

National:

2003 – 2004 Microsystem and Nanosystem Technologies for Sensors and Optoelectronics, Proj. No. IT.1.04.0062.B, Ministry of Science and Environmental Protection, Republic of Serbia
2005 – 2007 Micro and Nanosystem Technologies, Structures and Sensors, Proj. No. TR-6151, Ministry of Science and Environmental Protection, Republic of Serbia
2008 – 2010 Microsystem, Nanosystem Technologies and Devices, Proj. No. 11027, Ministry of Science and Technological Development, Republic of Serbia
2011 – 2019 Micro and Nanosystems for Power Engineering, Process Industry and Environmental Protection MiNaSyS, Proj. No. TR-32008, Ministry of Education, Science and Technological Development, Republic of Serbia
2018. Fabrication of MEMS structure for graphene microphone MGM, Dirigent Acoustics and Innovation Fond, Republic of Serbia, Innovation voucher no. 90 30.01.2018
2018. Graphene transfer for graphene microphone GMM, Dirigent Acoustics and Innovation Fond, Republic of Serbia, Innovation voucher no. 202 10.10.2018.
2020. Microfluidic Systems for Photoredox Reactions, Proof-of-Concept, Innovation Fond, Republic of Serbia, no. 5183.

Major Publications:

Journal papers:

  1. M. Smiljanić, V. Jović, Ž. Lazić, “Maskless convex corner compensation technique on a (100) silicon substrate in a 25 wt % TMAH water solution”, Journal of Micromechanic and Microengineering Vol. 22, 2012, 115011
  2. M. Smiljanić, B. Radjenović, M. Radmilović-Radjenović, Ž. Lazić, V. Jović, “Simulation and experimental study of maskless convex corner compensation in TMAH water solution”, Journal of Micromechanic and Microengineering Vol. 24, 2014, 115003
  3. Frantlović, I. Jokić, Ž. Lazić, M.M. Smiljanić, M. Obradov, B. Vukelić, Z. Jakšić and S. Stanković, "A method enabling simultaneous pressure and temperature measurement using a single piezoresistive MEMS pressure sensor", Measurement Science and Technology 27, 2016, 125101
  4. Jakšić, M. M. Smiljanić, D. Vasiljević-Radović, M. Obradov, K. Radulović, D. Tanasković, P. M. Krstajić, "Field localization control in aperture-based plasmonics by Boolean superposition of primitive forms at deep subwavelength", Opt Quant Electron 48, 2016
  5. M. Smiljanić, Ž. Lazić, B. Radjenović, M. Radmilović-Radjenović, V. Jović, "Evolution of Si Crystallographic Planes-Etching of Square and Circle Patterns in 25 wt % TMAH", Micromachines, 10, 102, 2019
  6. Sarajlić, M. Frantlović, M.M. Smiljanić, M.Rašljić, K. Cvetanović-Zobenica, Ž. Lazić, D. Vasiljević-Radović, "Thin-film four-resistor temperature sensor for measurements in air", Measurement Science and Technology 30, 2019, 115102
  7. M. Smiljanić, Ž. Lazić, V. Jović, B. Radjenović, M. Radmilović-Radjenović, "Etching of Uncompensated Convex Corners with Sides along <n10> and <100> in 25 wt% TMAH at 80 ℃", Micromachines, 11, 253, 2020
  8. Rašljić Rafajilović, K. Radulović, M.M. Smiljanić, Ž. Lazić, Z. Jakšić, D. Stanisavljev, D. Vasiljević Radović, "Monolithically Integrated Diffused Silicon Two-Zone Heaters for Silicon-Pyrex Glass Microreactors for Production of Nanoparticles: Heat Exchange Aspects ", Micromachines, 11, 818, 2020
  9. Vasić, U. Ralević, K. Cvetanović Zobenica, M.M. Smiljanić, Radoš Gajić, Marko Spasenović, Sten Vollebregt, "Low-friction, wear-resistant, and electrically homogeneous multilayer graphene grown by chemical vapor deposition on molybdenum", Applied Surface Science, 509, 2020, 144792
  10. V. Bošković, M. Sarajlić, M. Frantlović, M. M Smiljanić, D.V. Randjelović, Katarina Cvetanović Zobenica , D. Vasiljević Radović, "Aluminum-based self-powered hyper-fast miniaturized sensor for breath humidity detection", Sensors and Actuators B, 321, 2020, 128635
  11. Andrić, T. Tomašević-Ilić, M. V. Bošković, M. Sarajlić, D. Vasiljević-Radović, M. M Smiljanić, M. Spasenović, "Ultrafast humidity sensor based on liquid phase exfoliated graphene", Nanotechnology, 32, 2021, 025505
  12. M. Smiljanić, Ž. Lazić, M. Rašljić Rafajilović, K. Cvetanović Zobenica, E. Milinković, A. Filipović, "Silicon Y-bifurcated microchannels etched in 25 wt % TMAH water solution", Journal of Microengineering and Micromechanics, 31, 2021, 017001
  13. M. Smiljanić, B. Radjenović, Ž. Lazić, M. Radmilović-Radjenović, Rašljić Rafajilović, K. Cvetanović Zobenica, E. Milinković, A. Filipović, "Controllable arrangement of integrated obstacles in silicon microchannels etched in 25 wt % TMAH", Hemijska industrija, vol. 75(1), 2021, 15-24

Conference Proceedings and Papers:

1. Z. Đurić, M. M. Smiljanić, K. Radulović, Ž. Lazić, “Boron Redistribution During SOI Wafers Thermal Oxidation”, Proc. 25th Internat. Conf. on Microelectronics MIEL, Belgrade, 14-17 May 2006, vol. 1, pp. 333-336
2. D. M. Todorović, B. Cretin, Y. Q. Song, M. M. Smiljanić, Ž. Lazić, K. Radulović, “Photothermal Vibration Spectra of Square Diaphragm with Boss for Low-Pressure Sensor”, Proc. 26th Internat. Conf. on Microelectronics MIEL 2008, Niš, Serbia, 11-14 May 2008, Vol. 2, pp. 325-328
3. Z. Đurić, I. Jokić, M. Frantlović, D. Ranđelović, D. Vasiljevic-Radović, M. M. Smiljanić, Ž. Lazić, “Fabrication and Characterization of AFM Golden Microcantilevers and Measurement of Small Electromagnetic Forces”, Proc. 26th Internat. Conf. on Microelectronics MIEL 2008, Niš, Serbia , 11-14 May 2008, Vol. 2, pp. 363-366
4. Z. Đinović, M. Tomić, L. Manojlović, Ž. Lazić, M. M. Smiljanić, “Non-contact Measurement of Thickness Uniformity of Chemically Etched Si Membranes by Fiber-Optic Low-Coherence Interferometry”, Proc. 26th Internat. Conf. on Microelectronics MIEL 2008, Niš, Serbia, 11-14 May 2008, Vol. 2, pp. 321-324
5. V. Jović, J. Lamovec, M. M. Smiljanić, M. Popović, “Micromachining by Maskless Wet Anisotropic Chemical Etching Oriented Silicon”, Proc. 27th Internat. Conf. on Microelectronics MIEL 2010, Niš, Serbia , 16-19 May 2010
6. V. Jović, M. M. Smiljanić, J. Lamovec, M. Popović, “Microfabrication of Maskless-Mask Wet Anisotropic Etching for Realization of Multilevel Structures in Oriented Si”, Proc. 28th Internat. Conf. on Microelectronics MIEL 2012, Niš, Serbia , 13-16 May 2012
7. Ž. Lazić, M. M. Smiljanić, M. Rašljić, I. Mladenović, K. Radulović, M. Sarajlić, D. Vasiljević-Radović, "Wet isotropic chemical etching of Pyrex glass with masking layers Cr/Au", Proc. 1st Conf. IcETRAN, Vrnjačka Banja, June 2 – 5, 2014, pp. MOI1.1.1-4
8. Ž. Lazić, M. M. Smiljanić, M. Rašljić, "Glass Micromachining with Sputtered Silicon as a Masking Layer", Proc. 29th International Conference on Microelectronics MIEL 2014, Niš, Serbia, May 12-15, 2014, pp. 175-178
9. Ž. Lazić, M. M. Smiljanić, K. Radulović, M. Rašljić, K. Cvetanović, D. Vasiljević-Radović, Z. Djinović, C. Kment, "Design and Fabrication of the Silicon Moving Plate with Cantilever Beams for Paraffin Based Actuator", Proceedings of 2nd International Conference on Electrical, Electronic and Computing Engineering, IcETRAN 2015, Silver Lake, Serbia, June 8 – 11, 2015, pp. MOI2.1.1-6
10. M. Rašljić, I. Gadjanski, M.M Smiljanić, Novica Z. Janković, Ž. Lazić, K. Cvetanović Zobenica, "Microfabrication of bifurcated microchannels with PDMS and ABS", Proceedings of 4nd International Conference on Electrical, Electronic and Computing Engineering, IcETRAN 2017, Kladovo, Serbia, June 5 – 8, 2017, pp. MOI2.1
11. P. Poljak, M. Frantlović, M.M. Smiljanić, Ž. Lazić, I. Jokić, D. Randjelović, Z. Mitrović, "A Measurement Setup Enabling Automatic Characterization of Silicon Piezoresistive MEMS Pressure Sensors", CAS 2017 Proceedings 2017 International semiconductor conference, Sinaia, Romania 11.-14.10.2017, pp.237-240