- Planar and MEMS technologies
- MEMS and NEMS structures, components, devices and systems
- Processing electronics for sensors and transmitters
- Plasmonics and nanophotonics
- Chemical sensors
- Atomic force microscopy and optical spectroscopy
- Modeling and simulation
- Nanoparticles and nanomaterials for functionalization of MEMS and NEMS devices
- Development and testing of measurement transmitters