An overview of main research topics
Basic research in microsystem technologies
- Adsorpcion-desorption processes in MEMS/NEMS
- Fluctuations and noise in microsystems
- New technological processes in MEMS and NEMS
Building blocks for microsystems
- Micro and nanocantilevers
- Metamaterials
- Plasmonics
- Nanophotonics
- Nanomembranes
- Nanoparticles
- Composite systems thin film-substrate
Micro and nanosystems
- MEMS chip of low pressure sensor for elevated operating temperatures up 3000C
- MEMS chip of pressure sensor with built-in overpressure protection
- Multipurpose MEMS sensors based on Zeebeck effect
- Nanoplasmonic chemical and biological sensors
- Chemical and biological sensors based on micro/nanocantilevers
- Sensor of elementary mercury
- Inertial sensors
- MEMS microreactors
- Microactuators
Microoptoelectromechanical systems (MOEMS)
- Ultraviolet Si photodetectors
- Two-color Si PIN photodetectors
- Enhancement of IR detectors by plasmonic materials
