IHTM PLAVI
University of Belgrade
Institute of Chemistry, Technology and Metallurgy
National Institute of the Republic of Serbia

grb BUUniversity of Belgrade

Investigation of new technological procedures for MEMS and NEMS

CMT developed a full set of complementary planar and micro/nanofabrication tchnologies sufficient to fabricate microsystems and sensors of medium complexity. In this moment our research is directed towards mastering new procedures that should enable fabrication of MEMS and NEMS with a better resolution and more complex functions. The basic topics are:

  • Submicrometer photolithography by direct writing using a laser spot
  • Double-sided lithopgraphy
  • Semiconductor wafer bonding
  • Improvement of bulk micromachining procedures, especially those based on TMAH.
  • Improvement of surface micromachining procedures: forming sacrificial layers and methods to free MEMS/NEMS structures from solution without damages due to surface tension and stiction.

Department of Microelectronic Technologies

  • CMT announces funding through EU FP7 REGPOT project REGMINA that ensured its reinforcement as a Western Balkan centre of excellence for micro and nanosystems Regmina FP7

  • CMT is accredited by Serbian Ministry of Education, Science and Technological Development as a center of excellence for microsystems and nanosystems.

  • CMT is ISO 9001 Certified.

Contact

centar za mikoelektronske tehnologije

Centre of Microelectronic Technologies

Address:
Njegoseva 12
11000 Belgrade
Offices and Labs:
Studentski trg 16/III,Belgrade
Phone: +381 11 2638 188
Fax:+381 11 2182 995
e-mail:
dana@nanosys.ihtm.bg.ac.rs